Influence of the activation energy of the different migration effects on failure locations in metallization

verfasst von

Kirsten Weide-Zaage, Joharsyah Ciptokusumo, Oliver Aubel

Abstract

Migration effects like electro-, thermo- and stress migration are the main failure root causes in reliability stress tests of metallization systems. To access these effects by simulation, the mass flux and mass flux divergences are calculated with a user subroutine. Four models with different via bottom geometry were investigated. The mass flux divergence will be determined using a user routine which allows the direct calculation of the divgrad(x) terms. This allows a calculation with different activation energies for electro-, thermo- and stress migration. The activation energy of pure stress migration is supposed to be much higher compared to electromigration and pure thermo migration. The investigations were compared with measurements from literature yielding to good agreement.

Organisationseinheit(en)

Laboratorium f. Informationstechnologie

Externe Organisation(en)

Global Foundries, Inc.

Typ

Aufsatz in Konferenzband

Seiten

85-90

Anzahl der Seiten

6

Publikationsdatum

2010

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Allgemeine Physik und Astronomie

Elektronische Version(en)

https://doi.org/10.1063/1.3527141 (Zugang: Unbekannt)