Comprehensive reliability analysis of CoWP metal Cap unit processes for high volume production in sub-μm dimensions

authored by

O. Aubel, S. Thierbach, R. Seidel, B. Freudenberg, M. A. Meyer, F. Feustel, J. Poppe, M. Nopper, A. Preusse, C. Zistl, K. Weide-Zaage

Organisation(s)

Architectures and Systems Section

External Organisation(s)

Global Foundries, Inc.

Type

Conference contribution

Pages

675-676

No. of pages

2

Publication date

2008

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Engineering(all)

Electronic version(s)

https://doi.org/10.1109/RELPHY.2008.4558983 (Access: Unknown)