Dynamic simulation of octahedron slotted metal structures

authored by

J. Kludt, K. Weide-Zaage, M. Ackermann, V. Hein

Abstract

Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called "power metals" are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal-electrical-mechanical behaviour was simulated with the finite element software ANSYS®.

Organisation(s)

Laboratorium f. Informationstechnologie

External Organisation(s)

X-FAB Silicon Foundries SE

Type

Article

Journal

Microelectronics reliability

Volume

53

Pages

1606-1610

No. of pages

5

ISSN

0026-2714

Publication date

09.2013

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Safety, Risk, Reliability and Quality, Condensed Matter Physics, Surfaces, Coatings and Films, Electrical and Electronic Engineering

Electronic version(s)

https://doi.org/10.1016/j.microrel.2013.07.059 (Access: Unknown)