Deformation of octahedron slotted metal tracks

authored by

Jörg Kludt, Kirsten Weide-Zaage, Markus Ackermann, Verena Hein

Abstract

The advantage of an increased lifetime of slotted metal tracks for the use in integrated circuits has already been shown. A benefit for slotted metal track geometries especially for thick metal tracks under DC and DC pulsed stress test conditions could be confirmed by lifetime measurements. To achieve a higher current capability these metal tracks, also known as 'power metals', were used in upper metallization layers. This new design concept shows a better robustness towards electromigration in comparison to conventional wide unslotted metal tracks. A new concept deals with the use of slotted geometries in lower metallization layers. Simulations show a decrease of von Mises stress in comparison to unslotted metal tracks. This behaviour can reduce the current shift of active and passive devices due to the imposed stress of the lower metallization layers.

Organisation(s)

Laboratorium f. Informationstechnologie

External Organisation(s)

X-FAB Silicon Foundries SE

Type

Conference contribution

Pages

161-165

No. of pages

5

Publication date

2013

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, Electronic, Optical and Magnetic Materials

Electronic version(s)

https://doi.org/10.1109/IIRW.2013.6804184 (Access: Unknown)