Simulation of mass flux divergence distributions for an evaluation of commercial test structures with tungsten-plugs

authored by

Kirsten Weide-Zaage, Verena Hein

Organisation(s)

Laboratorium f. Informationstechnologie

External Organisation(s)

X-FAB Silicon Foundries SE

Type

Conference contribution

Pages

353-358

No. of pages

6

Publication date

2005

Publication status

Published

Peer reviewed

Yes

ASJC Scopus subject areas

Engineering(all)

Electronic version(s)

https://doi.org/10.1109/ESIME.2005.1502827 (Access: Unknown)